AN INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS ENGINEERING

Bringing you up-to-date with the latest developments in Mems technology, this major revision of the ..

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ANALYSIS & DESIGN PRINCIPLES OF MEMS DEVICES

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars,..

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Digital Holography for MEMS and Microsystem Metrology

Approaching the topic of digital holography from the practical perspective of industrial inspection,..

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Foundations of MEMS

Foundations of MEMS are an entry-level text designed to systematically teach the specifics of MEMS t..

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Fundamentals of Microfabrication

Nanotechnology and microengineering are among the top priority research areas in the United States a..

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MICRO ELECTRO MECHANICAL SYSTEM DESIGN

It is challenging at best to find a resource that provides the breadth of information necessary to d..

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Micromachined Transducers Sourcebook

This is the first textbook to provide a comprehensive overview of the field, beginning with micromac..

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MODELLING MEMS & NEMS

Designing small structures necessitates an a priori understanding of various device behaviors. The w..

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PRACTICAL MEMS

Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features..

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